Advanced Technology Facilities

Semiconductor

Nanotech. research institute
Project
Locations:
Leuven, Belgium
Duration:
2014 - 2016
Scope of M+W:
EPC for basebuild including site integration, wafer fab building and all facility systems, including process systems
Key Features
  • World-leading nanotechnology research institute
  • 450mm capable wafer fab extension to an existing facility
  • Cleanroom area: 4,000m²
  • Extreme requirements for vibration-control and ultra-clean environments