Advanced Technology Facilities
Semiconductors
Project
Location:
Beijing, Mainland China
Scope of Exyte:
EPC contractor for cleanroom package and process exhaust systems
Key Features
- Technology: Minimum feature size 28nm
- Cleanroom classes: ISO 5 & 6 (Class 100 & 1,000)
- Gross fab building area: 110,000 m2
- B2B 6K cleanroom: 14,000 m2
- B2A cleanroom: 30,000 m2