Advanced Technology Facilities
Semiconductors
Project
Location:
Shanghai, Mainland China
Scope of Exyte:
EPC for Basebuild
Key Features
- HLMC’s first greenfield fab
- 28nm to 14nm technology
- Total building area: 130,000m²
- Total cleanroom area: 34,000 m²
- Cleanroom classes: ISO 5 & 6 (Class 100 & 1k)
- Overall responsibility for cleanroom interior, office/lab interior, HVAC, mechanical, cleanroom air conditioning system, process exhaust system, process piping, electrical, FMCS etc.