Advanced Technology Facilities
Semiconductors
Nanotech research institute
Project
Location:
Leuven, Belgium
Scope of Exyte:
EPC for basebuild including site integration, wafer fab building and all facility systems, including process systems
Key Features
- World-leading nanotechnology research institute
- 450mm capable wafer fab extension to an existing facility
- Cleanroom area: 4,000m²
- Extreme requirements for vibration-control and ultra-clean environments